Low energy ion implantation using non-equilibrium glow discharge

Fabrication of Dense Non-Circular Nanomagnetic Device Arrays Using Self-Limiting Low-Energy Glow-Discharge Processing

We describe a low-energy glow-discharge process using reactive ion etching system that enables non-circular device patterns, such as squares or hexagons, to be formed from a precursor array of uniform circular openings in polymethyl methacrylate, PMMA, defined by electron beam lithography. This technique is of a particular interest for bit-patterned magnetic recording medium fabrication, where ...

Doping of carbon nanotubes using low energy ion implantation.

Carbon nanotubes (CNTs) were implanted with thermally decomposed oxygen (O2+) and nitrogen (N2+) ions at an acceleration voltage of 20 V. With a low dose of oxygen ions, the CNT-FET exhibited p-type behaviors with substantial changes in threshold voltage and in the slope of the source-drain current (l(sd)). However, at high dosages, the device exhibited metallic behaviors. After nitrogen doping...

Active Noise Control Using Glow Discharge

First-day spacecraft failures frequently occur as a result of the loads experienced during launch into orbit. These loads include structural vibrations transmitted at points of structural contact, and structural-acoustic vibrations created by the excitation of the payload fairing cavity. Structural control techniques, using piezoelectric actuators, have previously been studied as cost-effective...

RF Glow Discharge Atomic Emission Spectroscopy of Non-Conducting Materials

A glow discharge ion source with fourier transform ion cyclotron resonance mass spectrometric detection.

A glow discharge (CD) ion source has been coupled to a Fourier transform ion cyclotron resonance (FT-ICR) mass spectrometer using a four-element electrostatic lens to accelerate and focus ions generated external to the instrument's high magnetic field into its analyzer cell. Like other CD mass spectrometers, GD-FT-ICR can provide a quantitative measure of bulk analyte concentration with good pr...